Open AccessResearch on High Precision Angle Measurement and Compensation Technology Based on Circular Grating
Author(s) -
Minghao Gao,
Lu Wang,
Fenghao Zhao
Publication year - 2021
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1838/1/012075
Subject(s) - grating , compensation (psychology) , optics , piecewise , oscillation (cell signaling) , harmonic , observational error , accuracy and precision , physics , mathematics , acoustics , mathematical analysis , psychology , statistics , quantum mechanics , biology , psychoanalysis , genetics
In this paper, the angle measurement method of high-precision circular grating is studied. The principle analysis of circular grating angle measurement, the principle analysis of multi reading head, and the design of rotary servo control system are carried out. After analyzing the error model of circular grating angle measurement, the research based on harmonic compensation model is carried out respectively. Aiming at the problem of zero crossing oscillation of compensation algorithm, the piecewise compensation strategy is designed, which fully demonstrates the application value of circular grating angle measurement method in high-precision angle measurement system.