Open AccessFemtosecond laser micromachining of thin-film coatings in a high-voltage electrostatic field
Author(s) -
R. V. Chkalov,
D. G. Chkalova
Publication year - 2021
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1822/1/012019
Subject(s) - materials science , surface micromachining , laser ablation , femtosecond , laser , ablation , deposition (geology) , thin film , optoelectronics , voltage , nanoscopic scale , high voltage , optics , nanotechnology , electrical engineering , fabrication , engineering , medicine , paleontology , physics , alternative medicine , pathology , sediment , biology , aerospace engineering
The work is devoted to the problem of forming micro- and nanoscale elements topologies of high-resolution by means of controlled treatment of material surface with ultrashort laser pulses. The technology of processing thin-film coatings by the method of selective laser ablation is described. The possibility of using a high-voltage electrostatic field for collecting ablation products and preventing their deposition on the surface of formed microstructures is shown.