Open AccessEnhanced the dielectric and tunable properties of Pb0.3Sr0.7TiO3 and (Bi1.5Zn0.5)(Nb0.5Ti1.5)O7 trilayer film through adjusting heat treatment process
Author(s) -
Shuang Hou,
Xiuneng Li,
Yijian Ma,
Jian-Fu Tang,
Xujing Wu
Publication year - 2021
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1820/1/012125
Subject(s) - dielectric , materials science , thin film , annealing (glass) , figure of merit , sputter deposition , sputtering , analytical chemistry (journal) , dielectric function , dielectric loss , mineralogy , optoelectronics , nanotechnology , composite material , chemistry , chromatography
Pb 0.3 Sr 0.7 TiO 3 (PST) and Bi 1.5 Zn 0.5 Nb 0.5 Ti 1.5 O 7 (BZNT) thin films were deposited on Pt/Ti/SiO 2 /Si substrates by Sol-gel and radio frequency (rf) magnetron sputtering, respectively. The dielectric and tunable properties of thin films were investigated as a function of heat treatment processes. It’s found that the heat treatment process at the appropriate temperature and time can be used to obtain a good thin film. The film has the best comprehensive dielectric properties by annealing at 650°C for 45min, the figure of merit (FOM) is 20.1.