Open AccessCapturing higher modes of vibration of micromachined resonators
Author(s) -
Kumar Venkatesh,
Rudra Pratap
Publication year - 2009
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/181/1/012079
Subject(s) - resonator , microelectromechanical systems , acoustics , vibration , measure (data warehouse) , actuator , physics , excitation , q factor , normal mode , materials science , optics , engineering , optoelectronics , electrical engineering , computer science , quantum mechanics , database