Open AccessStandard absolute pressure transducers MIDA-SA-15-S for vacuum equipment
Author(s) -
Yu. A. Vas'kov,
E. G. Savchenko,
V. M. Stuchebnikov
Publication year - 2021
Publication title -
journal of physics. conference series
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1799/1/012039
Subject(s) - modbus , transducer , pressure sensor , sapphire , pressure measurement , materials science , absolute (philosophy) , electrical engineering , acoustics , mechanical engineering , physics , computer science , engineering , optics , operating system , philosophy , laser , software , epistemology
High-precision digital (RS485 / Modbus) absolute pressure transducer based on “silicon on sapphire” structures for vacuum technology is presented.