Open AccessStudy of partial pressures of gases in vacuum chamber using multifunctional high-vacuum plant
Author(s) -
A. N. Sokolov,
L. N. Rozanov,
M. Z. Schedrincky,
V. M. Bebyakov,
M. G. Vorobev,
V. A. Sinkova,
K. N. Sukharev
Publication year - 2021
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1799/1/012035
Subject(s) - ultra high vacuum , vacuum chamber , vacuum pump , materials science , analytical chemistry (journal) , nuclear engineering , chemistry , physics , mechanical engineering , nanotechnology , engineering , chromatography , composite material
The article studies the mass spectrum of gases inside the vacuum chamber of a multifunctional high-vacuum plant during pumping by different types of high-vacuum pumps. The most effective method to provide the high vacuum inside the cryovacuum systems is to jointly use turbomolecular and cryoadsorption pumps with the ion pump operating periodically.