Open AccessCathodic arc-PVD Zr-B-Si-C-Ti-(N) coatings
Author(s) -
И. В. Блинков,
Д. С. Белов,
V. M. Shestakova,
А. В. Черногор,
B. Yu. Kuznetsov,
А. И. Лаптев
Publication year - 2021
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1799/1/012002
Subject(s) - materials science , nanocrystalline material , boride , amorphous solid , carbide , coating , nitride , metallurgy , composite material , crystallography , nanotechnology , layer (electronics) , chemistry
Arc-PVD coatings Zr-B-Si-C-Ti-N and Zr-B-Si-C-Ti were obtained using combined evaporated ZrB 2 -SiC-Ti cathodes in a residual atmosphere of N 2 and Ar. Their structure and composition were investigated. The Zr-B-Si-C-Ti-N coating has a predominantly amorphous structure, formed mainly on the basis of nitride, carbide, boride phases and complex compounds Zr, Si, Ti. The Zr-B-Si-C-Ti coating is characterized by an amorphous-nanocrystalline structure. The amorphous component of this coating is formed mainly by phases based on Zr and Si. The nanocrystalline structure is formed by a complex carbide (Zr, Ti) C.