Open AccessThe method of processing data of mass spectrometric analysis of vacuum medium of quartz resonator-thermostats
Author(s) -
K. A. Belousov,
В. И. Струнин,
Г. Ж. Худайбергенов,
A. M. Yarosh
Publication year - 2021
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1791/1/012112
Subject(s) - thermostat , quartz , resonator , analytical chemistry (journal) , residual , materials science , optoelectronics , process engineering , mechanical engineering , engineering , computer science , chemistry , metallurgy , chromatography , algorithm
The theoretical and practical development of gas environmental analysis with the usage of a complex based on a residual gas analyzer is briefly presented. The data of technological search of annealing, degassing and sealing modes of quartz resonators and generators with participation of authors are summarized. The gas flow rate was estimated from the mass spectra. The method of measurement of working parameters of products, as well as estimation of operating time resource is proposed. Measurement of quartz resonator-thermostats (QRT) parameters is performed using serial technologies.