Open AccessCharacterization of a Commercial Thin Film-based Pressure Sensor
Author(s) -
JieHua Yang,
Ping Di,
Liang Qiao,
Xi Wang,
Hao QianChengjian MaJianxiang Ding,
Yunfeng Bai,
Shigen Zhu
Publication year - 2021
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1790/1/012041
Subject(s) - repeatability , pressure sensor , calibration , pressure measurement , acoustics , hysteresis , materials science , thin film , microelectromechanical systems , observational error , nonlinear system , computer science , accuracy and precision , measure (data warehouse) , simulation , engineering , optoelectronics , mathematics , physics , mechanical engineering , nanotechnology , data mining , statistics , quantum mechanics
Aiming at monitoring of lower limb movement, a MEMS integrated chip packaged in a sensing suit and a thin film pressure sensor packaged in a sensing insole are used to collect lower limb motion information. However, it was found that there was a huge error in the measurement of pressure when using the film-based pressure sensors to monitor the foot pressure in the lower limb movement. Hence, this paper describes a method for calibration of soft pressure sensors and characterizes the pressure through the proposed approach. The results show that there is a nonlinear relationship between the input (pressure) and the output (inverse value of the electrical resistance); the fitting error is about 5.5%; the hysteresis is around 4.2%;the zero drift is about 0.11%; the repeatability error is nearly 10.7% and the uncertainty of the sensor is about 14.64%. Therefore, it suggests that there often are notable repeatability errors and sensor uncertainty in the soft thin film pressure sensors, which would affect the accuracy in the monitoring of lower limb movements.