Open AccessInvestigation of the influence of substrate materials on oxidation resistance of TaSi2 and Ta-Si-N coatings using SEM, EDS and GDOES methods
Author(s) -
А. Д. Сытченко,
Ph. V. KiryukhantsevKorneev
Publication year - 2021
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1758/1/012040
Subject(s) - nanoindentation , materials science , annealing (glass) , sputter deposition , substrate (aquarium) , sputtering , composite material , nitrogen , metallurgy , chemical engineering , thin film , chemistry , nanotechnology , oceanography , organic chemistry , geology , engineering
Coatings were obtained by magnetron sputtering of a Ta-Si target onto Al2O3, Mo, Si and Ni-based substrates. Samples were studied in terms of their structure, mechanical properties and oxidation resistance by SEM, EDS, nanoindentation and GDOES methods. It was found that an increase in the concentration of nitrogen leads to an increase in the hardness of coatings by 60%. The behavior of coatings and various types of substrates during annealing at a temperature of 1000-1200 ˚C.