Open AccessThe problems associated with monitoring of main parameters of working areas and technological environments in high technology industry
Author(s) -
D. I. Belenkii,
T. M. Magomedov
Publication year - 2021
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1758/1/012003
Subject(s) - aerosol , cleanroom , control (management) , metrology , service (business) , process engineering , calibration , environmental science , computer science , manufacturing engineering , systems engineering , engineering , business , nanotechnology , materials science , meteorology , marketing , physics , quantum mechanics , artificial intelligence , optics
The first part of the article describes the regulatory requirements related to the control of the main parameters of working areas and technological environments in high technology manufacturing: number concentration of aerosol particles and cleanrooms classification, mass concentration of aerosol particles in the premises and means for its control, number concentration of particles in liquid media and methods of its control. In the second part of the article, the trend of deterioration of the technical condition of the existing measuring instruments for disperse parameters of aerosols, suspensions and powder materials is described. In conclusion, it is proposed to create service and calibration centers for measuring instruments maintenance, as well as shared-use equipment centers based on national metrological organizations.