Open AccessTiC nano-coating and their tribological properties were deposited by doal-ion beam sputtering on the tool surface
Author(s) -
Dou Zhang,
Zhangfaguang,
Guoyinglu,
Chenshaobo
Publication year - 2021
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1748/6/062029
Subject(s) - materials science , sputtering , coating , deposition (geology) , nano , tribology , ion beam , sputter deposition , service life , composite material , ion , beam (structure) , focused ion beam , metallurgy , thin film , nanotechnology , optics , chemistry , paleontology , physics , organic chemistry , sediment , biology
By using the method of doal-ion beam sputtering deposition, N element is injected with ions to assist sputtering deposition of TiC to prepare the TiC nano-coating with high binding strength. SEM, XRD, dynamic ultra-micro hardness tester, friction and wear testing machine were used to characterize and analyze TiC properties. The results show that the TiC coating prepared by double ion beam sputtering deposition has high hardness, high bonding strength, good friction and wear performance, and improves tool service life.