Open AccessCharacterization and In-Situ Test of Mechanical Properties of MEMS-Based Inertial Delay Slider Mechanism
Author(s) -
Guangyuan Wang,
Kai Wang,
Dai Xu-han,
Guifu Ding,
Xiaolin Zhao
Publication year - 2021
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1739/1/012036
Subject(s) - slider , clamping , microelectromechanical systems , mechanism (biology) , spring (device) , fictitious force , characterization (materials science) , inertial frame of reference , mechanical engineering , structural engineering , contact force , mechanics , materials science , acoustics , engineering , physics , nanotechnology , classical mechanics , quantum mechanics