Open AccessStudy of the influence of the substrate material on the phase composition and thickness of Ti-Pb coatings deposited by a magnetron
Author(s) -
А. А. Лозован,
S. Ya. Betsofen,
M. A. Lyakhovetsky,
Yu. S. Pavlov,
И. А. Грушин,
М. В. Лебедев,
T. S. Sukhova,
Е. П. Кубатина
Publication year - 2020
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1713/1/012027
Subject(s) - materials science , coating , substrate (aquarium) , sputter deposition , tetragonal crystal system , metallurgy , cavity magnetron , phase (matter) , diffraction , cathode , composite material , sputtering , thin film , optics , chemistry , nanotechnology , oceanography , physics , organic chemistry , geology
The structure of coatings deposited by reactive magnetron sputtering of Ti and Pb cathodes on substrates from Mo, 30HGSA and 304 steel was studied by X-ray diffraction. The thickness of the coatings was determined by the difference between the CTE of the coating and the substrate, which is maximum for Mo coating and minimum for 304 steel, for which the thickest coating was found, consisting of tetragonal modifications of PbO.