Open AccessStudy of the influence of substrate bias voltage on the texture of Nb coatings deposited on a Cu substrate
Author(s) -
А. А. Лозован,
S. Ya. Betsofen,
A. A. Labutin,
A. S. Lenkovets,
И. А. Грушин,
С. С. Александрова
Publication year - 2020
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1713/1/012026
Subject(s) - texture (cosmology) , materials science , substrate (aquarium) , coating , voltage , biasing , phase (matter) , composite material , electrical engineering , chemistry , oceanography , engineering , organic chemistry , artificial intelligence , computer science , image (mathematics) , geology
The phase composition and texture of Nb coatings deposited using an inverted magnetron at voltages on the Cu substrate from 0 to –300 V were investigated by an X-ray method. With an increase in the voltage on the substrate, the thickness of the coating decreases from 9–10 μm at voltages up to –100 V and decreases to 2 μm at –250 V. The texture of the coatings varies non-monotonically from (110) to (111), while at high voltages on the substrate in the range from –250 to –300 V, the Nb coating is characterized by a textureless state.