Open AccessEffect of bias voltage on texture formation in TiN, ZrN, Ta, Nb and W coatings
Author(s) -
S. Ya. Betsofen,
Л. М. Петров,
А. А. Лозован,
A. S. Lenkovets,
И. А. Грушин,
М. В. Лебедев
Publication year - 2020
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1713/1/012010
Subject(s) - tin , materials science , texture (cosmology) , anisotropy , lattice (music) , voltage , biasing , metallurgy , composite material , optics , electrical engineering , artificial intelligence , computer science , image (mathematics) , engineering , physics , acoustics
The effect of the reference voltage on the texture in TiN, ZrN, Nb, Ta and W coatings obtained by PVD methods was investigated by X-ray method. It is shown that an increase in the reference voltage leads to an increase in the {111} texture to a weakening of this texture in W coatings. The results were interpreted on the basis of the features of elastic anisotropy in the material of coatings with a cubic lattice.