Open AccessThe formation of SiNWs depending on the topology of the metal-catalyst film in the process of metal-assisted chemical etching of c-Si
Author(s) -
Anna Ermina,
Yu. A. Zharova,
Vladimir Bolshakov,
V. A. Tolmachev
Publication year - 2020
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1697/1/012110
Subject(s) - materials science , isotropic etching , ellipsometry , etching (microfabrication) , silicon , catalysis , metal , nanoparticle , substrate (aquarium) , chemical engineering , composite number , plasmon , deposition (geology) , nanotechnology , thin film , analytical chemistry (journal) , optoelectronics , layer (electronics) , composite material , chemistry , metallurgy , organic chemistry , paleontology , oceanography , sediment , geology , engineering , biology
The method of metal-assisted chemical etching for obtaining silicon nanowires, which consists of two stages, was studied. The conditions and modes for producing layers at both stages of the implemented technology are established, which include (1) chemical deposition of an array of self-organizing Ag nanoparticles on a Si substrate as a catalyst mask and (2) chemical etching of SiNWs to various depths from 110 to 1200 nm. The optical properties and morphology of a metal-catalyst (Ag) film were studied depending on the deposition time and solution concentration. Spectral ellipsometry was used to characterize the samples at all stages of MACE. Using the measured ellipsometric angles, the dielectric functions were determined, as well as the thicknesses and parameters of the fractions of composite layers in a multilayer model by approximating the effective Maxwell Garnett and Bruggeman medium for two-component layers. Samples with Ag nanoparticles with different morphologies were studied using reflection spectrophotometry in the wavelength range from 200 to 600 nm. The results showed that composite Ag-Si structures are promising for obtaining plasmon effects in both the visible and IR spectral regions.