Open AccessStudy of silicon nitride O-ring resonator for gas-sensing applications
Author(s) -
Anna Elmanova,
Pengli An,
Vadim Kovalyuk,
Alexander Golikov,
I. Elmanov,
G. Gol'Tsman
Publication year - 2020
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1695/1/012124
Subject(s) - resonator , silicon nitride , ring (chemistry) , footprint , silicon , materials science , optoelectronics , nitride , work (physics) , nanotechnology , chemistry , mechanical engineering , engineering , layer (electronics) , organic chemistry , paleontology , biology
In this work, we experimentally studied the influence of different gaseous surroundings on silicon nitride O-ring resonator transmission. We compared the obtained results with numerical calculations and theoretical analysis and found a good agreement between them. Our results have a great potential for gas sensing applications, where a compact footprint and high efficiency are desired simultaneously.