Open AccessDevelopment of a technology for producing thin-film structures based on TiO2 and ZrO2 oxides by gas thermal oxidation
Author(s) -
И. В. Родионов,
V. I. Proskuryakov,
I. V. Perinskaya,
Л. Е. Куц
Publication year - 2020
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1695/1/012057
Subject(s) - materials science , thermal oxidation , heterojunction , oxide , titanium , chemical engineering , indentation hardness , titanium alloy , thermal , alloy , titanium oxide , thermal treatment , thin film , metallurgy , composite material , nanotechnology , microstructure , optoelectronics , physics , meteorology , engineering
A new highly efficient method for gas-thermal oxidation of VT6 bioinert titanium alloy with a dosed feed of ultrafine TiO 2 /ZrO 2 particles into the treatment zone has been developed. A physical model for the formation of thin-film oxide heterostructures modified with TiO 2 /ZrO 2 powders has been developed. A set of physicomechanical properties and surface characteristics of oxidized titanium samples was experimentally studied. Electron microscopic studies and microhardness measurements of the synthesized film coatings were performed. A high-tech electric furnace device has been developed for the implementation of gas thermal oxidation with the simultaneous dosed supply of fine powder materials into the working chamber of the furnace.