Open AccessApplication of carbon nanoscale materials in instrument structures sensitive to the gas atmosphere
Author(s) -
Julia Morozova,
A A Rezvan,
В. С. Климин
Publication year - 2020
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1695/1/012027
Subject(s) - atmosphere (unit) , materials science , voltage , nanoscopic scale , gauge (firearms) , sensitivity (control systems) , deposition (geology) , carbon nanotube , chemical vapor deposition , nanotechnology , tube (container) , carbon fibers , analytical chemistry (journal) , optoelectronics , chemistry , composite material , physics , electrical engineering , electronic engineering , environmental chemistry , engineering , meteorology , paleontology , sediment , composite number , metallurgy , biology
This paper presents a study of a vacuum gauge with a sensitive element based on an array of carbon nanotubes. In the course of the study, a plasma chemical vapor deposition method was used, which allows one to obtain oriented CNT arrays on various substrates. A feature of this method is the use of catalytic centers. A model for calculating the parameters of the formed emission structure is constructed. The corresponding current-voltage characteristics are built. The results obtained during the study show that the vacuum gauge has a sensitivity of the order of 2.4·10 −8 A/Pa, a speed of 4 seconds, at U = 20 V, and an energy consumption of 1.5 · 10 −7 W.