Open AccessFormation of metal catalytic centers from atomic flows of matter for the growth of carbon nanostructures using PECVD method
Author(s) -
В. С. Климин,
A A Rezvan,
Julia Morozova,
О. А. Агеев
Publication year - 2020
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1695/1/012026
Subject(s) - nickel , catalysis , substrate (aquarium) , adsorption , atom (system on chip) , metal , silicon , materials science , carbon fibers , cluster (spacecraft) , flux (metallurgy) , chemical physics , chemical engineering , chemistry , metallurgy , composite material , biochemistry , oceanography , engineering , composite number , computer science , programming language , embedded system , geology
Consider formation of nickel catalytic centers from atomic flows obtained by the method of vacuum resistive evaporation. A model of formation kinetics of catalytic centers of nickel from atomic flows has been constructed. A complete model of theoretical studies of the formation of catalytic centers of nickel on a silicon surface is shown. A dependence of cluster concentration on normalized formation time is obtained. According to the results of theoretical studies, it was learned that flux of nickel atoms to substrate is F = 1.296 * 10 18 , residence time of nickel atom on substrate in adsorbed state is t g = 5.135 * 10 −7 , and concentration of adsorbed atoms as a function of time is N = 6.657 * 10 11 .