Open AccessComparative investigation of Zr-Mo-Si-B thin films using picoindener module and nanohardness tester
Author(s) -
Ph. V. KiryukhantsevKorneev,
П.А. Логинов,
Anton S. Orekhov
Publication year - 2020
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1686/1/012046
Subject(s) - materials science , indentation , transmission electron microscopy , crystallite , scanning electron microscope , ceramic , composite material , sputter deposition , energy dispersive x ray spectroscopy , glow discharge , sputtering , thin film , indentation hardness , microstructure , metallurgy , plasma , nanotechnology , physics , quantum mechanics
Zr–Mo-Si-B coatings were successfully deposited using non-reactive magnetron sputtering of ceramic ZrMoSiB target. Structural investigations have been carried out using X-ray diffraction analysis, high-resolution transmission and scanning electron microscopy, glow-discharge optical-emission, and energy-dispersive spectroscopy. The coatings were subjected to the indentation using nanohardness-tester and picoindenter module placed in the column of transmission electron microscope. The obtained results show that the coatings consist of hcp-ZrB 2 phase with needle crystallites 5-10 nm in diameter elongated in the direction of growth. The coatings demonstrated relatively high mechanical properties and recordable elastic recovery up to 84%. Results of indentation tests exhibited the close results.