Open AccessThinFilmsAnalysisMPEI – Software for XPS Analysis of Multilayer Multicomponent Films
Author(s) -
А. В. Лубенченко,
О. И. Лубенченко,
Д. А. Иванов,
И. В. Иванова
Publication year - 2020
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1683/3/032014
Subject(s) - profiling (computer programming) , x ray photoelectron spectroscopy , software , computer science , spectral line , interpretation (philosophy) , materials science , analytical chemistry (journal) , chemistry , chemical engineering , engineering , physics , environmental chemistry , operating system , astronomy , programming language
The work presents ThinFilmsAnalysisMPEI software implementing the method of chemical and phase depth profiling based on photoelectron spectra interpretation, described in paper [1]. Efficiency and productivity of the software for the problem of chemical and depth profiling is shown on examples of synthetic and experimental spectra.