Open AccessThe Evaluation and Research of step profiler about the measurement uncertainty
Author(s) -
Chenggang Hu,
Lijun Yang,
Fei Lv,
Jieji Li,
Zhao Tao,
Yu Wu,
Liang Xue
Publication year - 2020
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1678/1/012030
Subject(s) - repeatability , measurement uncertainty , transformation (genetics) , remote sensing , computer science , optics , mathematics , statistics , physics , geology , biochemistry , chemistry , gene
The step profiler has the advantages of excellent repeatability and high resolution. However, as a new contact measurement equipment, it has specific measurement errors. This paper proposes a novel method to evaluate a step profiler’s accuracy by measuring the nano grating standard structure. These standard step height and pitch samples are used in the measurement process. The samples’ morphological characteristics were obtained by Fourier transformation, phase modulation, and phase splicing of the sampled data. The experimental results show that the step profiler’s vertical and horizontal relative measurement uncertainty is 4.0% and 1.2%.