Open AccessGas-discharge plasma diagnostics by a continuous spectrum of optical radiation
Author(s) -
V. A. Pinaev,
M. V. Isupov
Publication year - 2020
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1677/1/012146
Subject(s) - plasma , glow discharge , atomic physics , materials science , electric discharge in gases , inert gas , plasma diagnostics , electron temperature , electron , range (aeronautics) , plasma parameters , radiation , optics , physics , quantum mechanics , composite material
In the present work, plasma diagnostics method based on the measurement and theoretical analysis of continuous emission spectrum of a gas discharge was discussed. Using the method, electron temperatures of a DC glow discharge and ferromagnetic enhanced inductive discharge were determined for inert gases in the gas pressure range of 20–200 Pa. Experimental results were compared with the results of numerical calculations for the ferromagnetic enhanced inductive discharge and DC glow discharge. A satisfactory agreement between the optically measured and numerically calculated values of electron temperature was shown.