Open AccessDevelopments and Recent Progresses in Microwave Impedance Microscope
Author(s) -
Zhijie Chen,
Baolong Guo,
Zhaoqi Zhong
Publication year - 2020
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1650/2/022086
Subject(s) - microwave , electrical impedance , microscope , materials science , microwave imaging , computer science , capacitance , engineering physics , electronic engineering , nanotechnology , optoelectronics , electrical engineering , telecommunications , electrode , optics , engineering , physics , quantum mechanics
Microwave impedance microscope (MIM) is a near-field microwave technology which has low emission energy and can detect samples without any damages. It has numerous advantages, which can significantly suppress the common-mode signal as the sensing probe separates from the excitation electrode, and it is a powerful tool to characterize electrical properties with high spatial resolution. This article reviews the major theories of MIM in detail which involve basic principles and instrument configuration. Besides, this paper summarizes the improvement of MIM properties, and its cutting-edge applications in quantitative measurements of nanoscale permittivity and conductivity, capacitance variation and electronic inhomogeneity. The relevant implementations in recent literature and prospects of MIM based on the current requirements are discussed. Limitations and advantages of MIM are also highlighted and surveyed to raise awareness for more research into the existing near-field microwave microscopy. This review on the ongoing progress and future perspectives of MIM technology aims to provide reference for the electronic and microwave measurement community.