Open AccessThe Simulation of Resonant Mode and Effective Electromechanical Coupling Coefficient of Lithium Niobate Crystal with Different Orientations
Author(s) -
Xiaoyuan Bai,
Yao Shuai,
Wenbo Luo,
Chuangui Wu,
Wanli Zhang
Publication year - 2020
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1637/1/012064
Subject(s) - materials science , electromechanical coupling coefficient , lithium niobate , piezoelectricity , coupling coefficient of resonators , acoustics , resonator , bandwidth (computing) , optoelectronics , composite material , physics , computer science , computer network
At present, the proportion and role of thin film bulk acoustic wave (FBAR) filters in mobile communication products are becoming more and more obvious due to its higher work frequency and smaller size. As a commonly used piezoelectric material, aluminum nitride (AlN) limits the bandwidth of the FBAR filter because of its small electromechanical coupling coefficient (k t 2 ) of ~6.5%. On contrast, lithium niobate (LiNbO 3 , LN) crystals with some certain specific orientations have much better acoustic properties, making this type of material the promising candidate for FBAR applications. In this work, the acoustic resonant mode in LN crystal is analyzed by FEM simulations. In order to obtain the optimal orientations with good longitudinal wave property, Euler angle (EA) method is used to simulate the resonant modes and calculate the corresponding k t 2 of different orientations. Besides, the correctness of EA method has been demonstrated in this work by comparing the displacement change under electrostatic field with the traditional matrix transformation operation depending on the piezoelectric effect. The simulations show that the 43°Y-cut LiNbO 3 has a high k t 2 and a pure longitudinal wave vibration mode simultaneously, making this orientation the most proper candidate for FBAR filters application with large bandwidth.