Open AccessControl of the conducting surface by terahertz surface electromagnetic waves
Author(s) -
A. K. Nikitin,
V. V. Gerasimov,
B. A. Knyazev,
Nghiem Thi Ha Lien,
Ta Thu Trang
Publication year - 2020
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1636/1/012036
Subject(s) - terahertz radiation , monochromatic color , electromagnetic radiation , semiconductor , optics , electromagnetic spectrum , optoelectronics , surface (topology) , physics , materials science , mathematics , geometry
The paper considers the possibilities of quality control of the conductive surface and detection of objects on it beyond the horizon, as well as microscopy of flat faces of semiconductor products using surface electromagnetic waves (SEWs) of the terahertz (THz) range. The conditions under which such methods of control can be implemented are determined; schemes of devices that implement such measurements are elaborated; estimates of the possibilities of the developed methods for monitoring metal and semiconductor products probed by monochromatic THz radiation in the form of SEWs are given.