Open AccessMicropumps for Microfluidic Devices and BioMEMS
Author(s) -
Cheng Hu,
Chenlin Bai,
Peiyu Zhang
Publication year - 2020
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1626/1/012040
Subject(s) - microfluidics , micropump , reciprocating motion , electrohydrodynamics , nanotechnology , mechanical engineering , materials science , engineering , electrode , physics , quantum mechanics , gas compressor
The development of micropumps are reviewed and their applications are summarized. The micropumps are categorized into indirectly-driven and directly-driven micropumps according to the ways of driven origination from working principles. The actuation principles are introduced in detail including electrostatic, piezoelectric, thermopneumatic actuation, etc. Moreover, the performance influencing parameters on the property and the applications of various micropumps for medical therapy are described such as reciprocating, peristaltic, rotary, electrohydrodynamic, micropumps, etc. The challenge of micropumps is also discussed.