Open AccessPrototyping new type Bi2Sr2CaCu2O8+x devices using a consumer-oriented inkjet printer
Author(s) -
Yasuyuki Yamada,
Takuya Okamoto
Publication year - 2020
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1590/1/012046
Subject(s) - resist , photoresist , materials science , microfabrication , thin film , etching (microfabrication) , nanotechnology , undercut , photolithography , optoelectronics , composite material , layer (electronics) , fabrication , medicine , alternative medicine , pathology
We have tried the microfabrication of Bi 2 Sr 2 CaCu 2 O 8+x (Bi2212) thin films. The thin films were prepared by the metal-organic decomposition method. The photoresist was printed on the thin films using a consumer-oriented inkjet printer. Filling a black cartridge with resist diluted 3 times with ethanol and printing with 80% black can minimize both the scattering of the resist and the areas where the resist is not on. After etching the thin films with citric acid, the photoresist was stripped with NaOH. Under the printing and etching conditions in this report, the resist width was about 0.05 mm wider than the desired width, and the undercut width was about 0.08 mm. We succeeded in forming a bridge of about 75 μm.