Open AccessSimulation analysis of grid-type PVD thin film sensor based on COMSOL
Author(s) -
Yafei Song,
Ronghong Cui,
Yuting He,
Tao Chen,
Xiangqian Fan
Publication year - 2020
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1550/3/032023
Subject(s) - multiphysics , sensitivity (control systems) , materials science , finite element method , physical vapor deposition , structural health monitoring , grid , thin film , deposition (geology) , acoustics , electronic engineering , optoelectronics , structural engineering , composite material , engineering , nanotechnology , geometry , mathematics , physics , paleontology , sediment , biology
On-line quantitative monitoring of fatigue crack sensors is an important part of structural health monitoring systems. A rectangular grid-type PVD (physical vapor deposition) thin film sensor based on the potentiometric method is designed in this paper. First, the sensor finite element model is established through the AC/DC module of COMSOL Multiphysics to verify the feasibility of the sensor to monitor cracks. Second, the effect of the number of sensing channels on the sensitivity of the sensor is studied. Finally, the structural parameters of the sensor are optimized. Significantly improved sensitivity for crack detection. The results show that the rectangular grid PVD film sensor can effectively monitor structural cracks.