Open AccessInfluence of scandium concentration on parameters of piezoelectric transducer based on aluminum scandium nitride
Author(s) -
А. Г. Козлов,
T. N. Torgash
Publication year - 2020
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1546/1/012118
Subject(s) - scandium , transducer , materials science , piezoelectricity , electrical impedance , nitride , aluminium , acoustics , composite material , layer (electronics) , metallurgy , electrical engineering , physics , engineering
An analytical approach is presented that allows one to determine the influence of the scandium concentration on the input electrical impedance of piezoelectric transducer based on aluminum scandium nitride. The scandium concentration dependences of the properties aluminum scandium nitride affecting on the transducer impedance were determined by means of the approximation of the dependences obtained from their experimental values for various Sc concentration. Based on the frequency dependences of the impedance the influence of Sc concentration in Al1-xScxN piezoelectric layer on the frequencies of the serious and parallel resonance of the unloaded and loaded transducer has been established.