Open AccessIDEs structures created in the physical vacuum deposition process on textile substrates
Author(s) -
Ewa Korzeniewska,
A. Szczęsny,
Dominik Kasprowicz
Publication year - 2020
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1534/1/012004
Subject(s) - deposition (geology) , electrical impedance , substrate (aquarium) , materials science , electrode , textile , process (computing) , vacuum deposition , optoelectronics , range (aeronautics) , electronic engineering , computer science , thin film , composite material , electrical engineering , nanotechnology , engineering , chemistry , paleontology , oceanography , sediment , geology , operating system , biology
The article proposes a method for producing interdigitated electrodes structures on a flexible composite substrate in the physical vacuum deposition process. Ag and Au with a purity of 99.99% were used as deposited metals. The results of impedance measurement of created structures in the range up to 500 kHz are presented. Based on the results of computer simulation, an equivalent circuit for computer simulation of the structures has been proposed based on measurement result. It can be used in the design of sensors built based on IDEs in textronic systems. The very high agreement was obtained between impedance measurements and simulation results up to tens of kilohertz.