Open AccessInfluences of deposition parameters on microstructure and dielectric properties of BST thin film deposited by R.F. magnetron sputtering
Author(s) -
Chao Xiang,
Tianjin Zhang,
Ruikun Pan,
Jinzhao Wang,
Zhijun Ma,
Xia Min
Publication year - 2009
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/152/1/012034
Subject(s) - materials science , thin film , dielectric , microstructure , sputter deposition , crystallization , substrate (aquarium) , scanning electron microscope , dielectric loss , sputtering , composite material , analytical chemistry (journal) , optoelectronics , nanotechnology , chemical engineering , chemistry , oceanography , chromatography , geology , engineering