Open AccessPerformance-increasing technique in micromechanical accelerometer development
Author(s) -
Dmitry Ershov,
Irina Lukyanenko,
Е. Э. Аман
Publication year - 2020
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1515/5/052073
Subject(s) - microelectromechanical systems , accelerometer , variety (cybernetics) , reliability (semiconductor) , computer science , radar , scale (ratio) , engineering , automotive engineering , systems engineering , telecommunications , materials science , nanotechnology , power (physics) , physics , quantum mechanics , artificial intelligence , operating system
Requirements for higher-performance on-board control systems and instruments applied in a variety of small-scale moving objects results in the necessity to develop micromechanical sensors – small, lightweight, energy-efficient and, at the same time, offering high-reliability performance and easy-to-use. Development of such MEMS will require – in its turn – controlling parameters which determine the quality of the sensor. These strictly-controlled parameters will most immediately influence the desired outcomes and underlie more efficient use of resources to achieve the desired aims. The problem discussed has already been studied by many scientists. MEMS have been and are being developed by both Russia-based and foreign companies like Honeywell International Inc., Analog Devices Inc., JSC Radar MMS, Temp-Avia plc., to name a few.