Open AccessDesign and performance of NiCr-based micro-heater with lower excitation energy
Author(s) -
W. Liu,
Qianqian Su,
Yan Xue,
Ruizhen Xie,
Xueming Ren,
L. Liu
Publication year - 2020
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1507/2/022015
Subject(s) - microelectromechanical systems , materials science , explosive material , voltage , wafer , miniaturization , nichrome , substrate (aquarium) , composite material , optoelectronics , electrical engineering , nanotechnology , engineering , chemistry , oceanography , organic chemistry , geology
Low energy and miniaturization are two main development directions for the MEMS (Micro-Electro-Mechanical System)-based initiator. The MEMS-based initiators or called fire components were fabricated by the way of that the secondary explosive charges were coated or synthetized with in-situ method onto the NiCr-based micro-heater surface. The firing voltage experiments of the fire component under capacity loading were performed. The fire voltages of the fire components with rectangle micro-heater increase linearly with the increasing of micro-heater’s width, and decrease with the increasing of micro-heater’s thickness. The fire voltages of the fire components with Pyrex7740 substrate cut down to 50%, compared to the fire component with silicon substrate. The fire component with lower explosive density contributes to reduce the fire voltage. The micro-heater with parallel connection structure or called parallel micro-heaters cannot have lower fire voltage than the single micro-heater, but have more reliability to initiate the secondary explosive.