Open AccessPhonon transport in suspended silicon nitride membranes at low temperatures
Author(s) -
J. T. Karvonen,
Thomas Kühn,
I. J. Maasilta
Publication year - 2009
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/150/1/012019
Subject(s) - silicon nitride , membrane , phonon , materials science , nitride , silicon , chemical physics , condensed matter physics , optoelectronics , engineering physics , nanotechnology , chemistry , physics , biochemistry , layer (electronics)