Open AccessAmmonia sensors based on resistive structures M–SnO2:Sb–M
Author(s) -
A. V. Tsymbalov,
V. M. Kalygina,
N. K. Маksimova,
Е. V. Chernikov
Publication year - 2020
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1499/1/012037
Subject(s) - materials science , temperature cycling , cycling , resistive touchscreen , tin , ammonia , tin dioxide , analytical chemistry (journal) , thermal , time constant , atmospheric temperature range , sputtering , optoelectronics , thin film , metallurgy , chemistry , thermodynamics , electrical engineering , nanotechnology , physics , archaeology , organic chemistry , history , engineering , chromatography
The paper presents a comparison of the responses of sensors to ammonia in continuous heating and thermal cycling modes, and also shows the dependence of the response time of the sensors on the content NH 3 . Thin films of tin dioxide were obtained using RF magnetron sputtering, and then annealed in air at a temperature of 425°C for 24 hours. In thermal cycling, the temperature of the heating cycle remains constant 400 °C (duration of the heating cycle was 8 s). The temperature of the cooling cycle changes in the range 200 °C – 100 °C, but duration of cooling of the cooling cycle was remained constant of 5 s. It was shown that the thermal cycling mode has several advantages over the constant heating mode. The experiments showed that sensors based on SnO 2 :Sb have short response times – less than 3 seconds.