Open AccessStructural and optical properties of thin TiO2:C films – influence of the substrate-erosion zone radial distance
Author(s) -
O. Angelov
Publication year - 2020
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1492/1/012055
Subject(s) - materials science , thin film , anatase , amorphous solid , x ray photoelectron spectroscopy , raman spectroscopy , rutile , sputter deposition , analytical chemistry (journal) , substrate (aquarium) , sputtering , optics , crystallography , nanotechnology , chemical engineering , chemistry , photocatalysis , biochemistry , physics , oceanography , chromatography , geology , engineering , catalysis
The structural and optical properties were studied of thin TiO 2 :C films deposited on glass substrates by r.f. magnetron co-sputtering of a TiO 2 target and carbon plates placed on its erosion zone in an atmosphere of Ar (0.5 Pa) + air(0.6 Pa). The total area of the carbon plates was 830 mm 2 , and the radial distance between the center of the glass substrates (15×25×1 mm) and the circle of the erosion zone with a maximum sputtering rate was 2 cm and 4 cm. The as-deposited and annealed (air, 400 °C, 1 h) thin films with a thickness of about 150 nm were studied via reflectance and transmittance measurements, X-ray photoelectron spectroscopy (XPS), grazing incidence X-ray diffractometry (GI XRD) and Raman spectroscopy. The optical spectra of the thin films deposited at the higher radial distance from the erosion zone maximum demonstrated absorption in the visible range. The XRD patterns revealed a mix of amorphous and nano-crystalline anatase and rutile TiO 2 phases in all thin films. The reflections of the experimental XRD patterns indicated the presence of tensile stress in the grains. The Raman spectra confirmed the nano-crystalline structure of the anatase and rutile phases of the films. The incorporation is discussed of C atoms in the TiO 2 films.