Open AccessPyrolyzed 3D compound refractive lens
Author(s) -
Ksenia Abrashitova,
Grigory E. Kulagin,
A. K. Petrov,
Vladimir O. Bessonov,
A. A. Fedyanin
Publication year - 2020
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1461/1/012129
Subject(s) - microfabrication , lithography , synchrotron radiation , materials science , optics , lens (geology) , polymer , pyrolysis , synchrotron , x ray lithography , optoelectronics , nanotechnology , resist , physics , chemistry , composite material , fabrication , organic chemistry , medicine , alternative medicine , pathology , layer (electronics)
X-ray synchrotron and laboratory source radiation is used to solve a wide range of problems in modern science. Compound refractive lenses (CRLs) technology is a popular solution for focusing x-ray. However weak interaction of X-ray radiation with matter puts extra challenges for microfabrication techniques and materials. Two-photon lithography has been successfully applied for polymer CRL microfabrication. However polymer material is likely to degrade in intense X-ray beams. This article describes pyrolysis (heating in inert atmosphere) as an improvement of two-photon lithography technique. This extra step may produce ultrasmall curvature radii CRLs with extra durability in intense X-ray beams