Open AccessEmitting properties of a-Si:C:H films with a gold submicron grating
Author(s) -
S. I. Pavlov,
Sergey A. Dyakov,
A. K. Samusev,
A. V. Nashchekin,
E. M. Tanklevskaya,
Н. А. Феоктистов,
N. A. Gippius,
S. G. Tikhodeev,
Dmitry Pidgayko,
А. Б. Певцов
Publication year - 2020
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1461/1/012126
Subject(s) - materials science , grating , photoluminescence , amorphous solid , plasmon , polarization (electrochemistry) , optics , electron beam lithography , optoelectronics , amorphous silicon , spectral line , lithography , silicon , spectroscopy , nanotechnology , resist , crystalline silicon , chemistry , crystallography , physics , layer (electronics) , astronomy , quantum mechanics
In this study reflection and photoluminescence spectra of a-Si:C:H thin film with gold grating on it was examined theoretically and experimentally. The hydrogenated amorphous amorphous silicon-carbon alloy films were fabricated by the PECVD technique. Arrays of gold stripes with different gold width were created by lift-off e-beam lithography. Reflection, and PL spectra has been measured by a Fourier imaging spectroscopy. The theoretical calculations are in a good agreement with experimental results. From the PL spectra it follows, that the TE polarization gives sharper and more efficient PL signal than the TM polarization, and PL efficiency almost does not depend on gold stripes widths. It was shown that only in TE modes the PL outcouples from the gratings owing to the fact that there is no plasmon’s affect in this polarization.