Open AccessZnO nanostructures by atomic layer deposition method
Author(s) -
A. Szczepanik,
Ł. Wachnicki,
M. Godlewski,
E. Guziewicz,
K. Kopalko,
E. Janik,
E. Łusakowska,
Andrzej Czerwiński,
Mariusz Płuska,
S. Yatsunenko
Publication year - 2009
Publication title -
journal of physics. conference series
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/146/1/012017
Subject(s) - atomic layer deposition , nanostructure , nanotechnology , passivation , limiting , materials science , nanopore , nanowire , quantum dot , layer (electronics) , engineering physics , physics , engineering , mechanical engineering