Open AccessThe method of the research of residual gases in a tight case of quartz resonators
Author(s) -
K. A. Belousov,
В. И. Струнин,
Г. Ж. Худайбергенов
Publication year - 2020
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1441/1/012035
Subject(s) - thermostat , quartz , residual , residual gas analyzer , resonator , residual volume , volume (thermodynamics) , cabin pressurization , materials science , analytical chemistry (journal) , range (aeronautics) , mass spectrometry , chemistry , composite material , mechanical engineering , optoelectronics , thermodynamics , engineering , environmental chemistry , physics , chromatography , computer science , lung volumes , linguistics , philosophy , algorithm , lung
Mass spectrometric analysis of closed-volume gases of quartz resonators-thermostats emitted by the materials used in the installation of the device. A measuring complex with a vacuum of 10 −5 ÷10 −6 Pa has been developed. The mass spectra of the residual gases were obtained before the depressurization of the products in the DIL-14 housing. The temperature range of the study is 20÷160 °C.