Open AccessA modified capacitance model of shunt micro switch based on MEMS technology in actuation mode: simulation and analytical study
Author(s) -
Kurmendra,
Rajesh Kumar
Publication year - 2020
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1432/1/012007
Subject(s) - multiphysics , capacitance , microelectromechanical systems , matlab , voltage , parasitic capacitance , electronic engineering , materials science , computer science , electrical engineering , engineering , optoelectronics , physics , finite element method , structural engineering , electrode , quantum mechanics , operating system
In this paper, a modified mathematical model for capacitance analysis of micro-electro-mechanical switch based on Agarwal’s Model has been presented. This model is applicable in the condition when the micro-switch is supplied with electrostatic voltages. Effects of perforated structure and fringe field are accounted for accurate capacitance analysis of the micro-switch. The switch parameters such as thickness of dielectric material and actuation voltage for micro switch have also been considered in the present study. The switch is designed and simulated using COMSOL Multiphysics tool and results obtained through simulations have been validated using MATLAB software. It is found that the results obtained by simulation and mathematical model are in agreement closely for the presented study. This model could be used for evaluation of capacitance in downstate of the micro-switch for symmetric structures.