Open AccessThe results of modelling of a micromechanical accelerometer
Author(s) -
Igor Lysenko,
Ольга Александровна Ежова,
Alexey V. Tkachenko,
Д В Науменко,
Koushik Guha,
K. Sambasiva Rao
Publication year - 2019
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1410/1/012226
Subject(s) - sensitivity (control systems) , acceleration , accelerometer , finite element method , linear acceleration , basis (linear algebra) , parameterized complexity , vhdl ams , computer science , modal analysis , acoustics , engineering , structural engineering , electronic engineering , hardware description language , physics , geometry , mathematics , algorithm , classical mechanics , field programmable gate array , computer hardware , operating system
This theses the linear acceleration sensor design with three axis of sensitivity is researched. Parameterized geometry and finite element model for modal analysis are developed in the ANSYS program. Behavioral description of the study design is developed with language VHDL-AMS to simulate the sensor operation under the influence of linear acceleration along three axis of sensitivity. On the basis of research results three-axis device sensitivity, cross-sensitivity, duration transients are specified. As part of the work the experimental sensor prototypes are fabricated.