Open AccessFormation of out-of-plane film micro arch by methods of technological control of internal stress
Author(s) -
Yakov Enns,
R Kleimanov
Publication year - 2019
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1410/1/012213
Subject(s) - internal stress , materials science , arch , microelectromechanical systems , surface micromachining , work (physics) , plane (geometry) , stress (linguistics) , sputtering , mechanical engineering , composite material , metallurgy , structural engineering , thin film , nanotechnology , engineering , geometry , philosophy , alternative medicine , mathematics , pathology , fabrication , medicine , linguistics
In this work is presented the analysis of the manufacturing technology of arcuate elastic elements. In the course of the work, the technological problems of the formation of out-of-plane microelectromechanical structures with the use of surface micromachining were studied. Internal stresses were controlled by varying the pressure of the working gas during sputtering. The use of this method allowed forming the arcuate profile of the Cr-Cu-Cr film structure.