Open AccessProperties of GaN optomechanical nanobeam cavity
Author(s) -
К. М. Морозов,
К. А. Иванов,
Elizaveta I. Girshova,
А. С. Соколовский,
A. P. Mikitchuk
Publication year - 2019
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1410/1/012156
Subject(s) - materials science , q factor , gallium nitride , finite element method , optical cavity , quality (philosophy) , optics , optoelectronics , gallium , resonator , physics , nanotechnology , laser , quantum mechanics , layer (electronics) , metallurgy , thermodynamics
Gallium nitride based nanobeam cavity system was theoretically analysed by using finite element method-based model. Optical and mechanical resonant localized modes structure of the nanobeam cavity was calculated. Depend on the geometrical properties there were found modes with high quality factor for the both cases. The maximum optical quality factor reaches value 5.10 4 in cavity with value d = 90 nm .