Open AccessMacroscopic Actuation for Deployable Microvalves: Coupling Mechanically While Isolating Thermally
Author(s) -
Caroline Kelly,
Xi Xie,
Arash Dodge,
California Livermore
Publication year - 2019
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1407/1/012125
Subject(s) - actuator , coupling (piping) , valve actuator , materials science , control valves , flow (mathematics) , flow control (data) , flow control valve , hydraulic machinery , mechanical engineering , fluidics , microelectromechanical systems , engineering , mechanics , electrical engineering , optoelectronics , physics , telecommunications
This paper presents the design and initial experimental validation of a system that couples macroscale actuations to a micro flow control system via a hydraulic coupler that isolates the actuator from the valve both spatially and thermally. The hydraulic coupling architecture is designed to enable flow control valves at MEMS length scales to employ macroscale actuation for effective valve sealing while still keeping the size of the valve itself much smaller than the size of the actuator. Lumped-element modelling shows that separating the sealing unit from its actuator can significantly increase the thermal isolation of the valve’s sealing unit from the ambient environment. This approach can enable the valve to be heated to minimize internal condensation with a minimum amount of required power. The manufacture of the hydraulic coupler is described, and its output actuation is measured as a function of input actuation. Finally, gas flow is successfully modulated via actuations that are delivered through the hydraulic coupler.