Open AccessImproved micronanogenerators based on silicon compatible materials and processing
Author(s) -
İnci Dönmez,
Marc Dolcet,
A. Stranz,
M. Salleras,
L. Fonseca,
Gerard Gadea,
Mercè Pacios,
Álex Morata,
Albert Tarancón
Publication year - 2019
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1407/1/012097
Subject(s) - silicon , materials science , thermoelectric effect , optoelectronics , thermoelectric generator , silicon nanowires , engineering physics , thermal resistance , heat exchanger , nanotechnology , thermal , mechanical engineering , engineering , physics , meteorology , thermodynamics
Our work on all-silicon thermoelectric micro power generation is reviewed including the latest improvements. Our devices use low-dimensional silicon-based thermoelectric material, namely Si and (for the first time) SiGe nanowires. A new redesign leading to a significant reduction in parasitic device thermal conductance and lower electrical resistance has been tested and a route for the integration of a heat exchanger onto it has been recently attempted. Power densities of a few tens of μW/cm 2 have been achieved.