Open AccessA Resonance-Maintaining Circuit for High-Efficiency Electret-based MEMS Vibrational Energy Harvesters
Author(s) -
Hiroyuki Mitsuya,
Hisayuki Ashizawa,
Masato Morita,
H Homma,
Gen Hashiguchi,
Hiroshi Toshiyoshi
Publication year - 2019
Publication title -
journal of physics. conference series
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.21
H-Index - 85
eISSN - 1742-6596
pISSN - 1742-6588
DOI - 10.1088/1742-6596/1407/1/012090
Subject(s) - electret , microelectromechanical systems , voltage , energy harvesting , resonance (particle physics) , efficient energy use , materials science , energy (signal processing) , optoelectronics , electrical engineering , electronic circuit , energy conversion efficiency , high voltage , engineering , physics , atomic physics , quantum mechanics , composite material
We have developed a high-efficiency MEMS vibrational energy harvester with a resonance-maintaining circuit. Of particular note, the circuit is capable of both (1) rectifying the output to compensate for the electret bias voltage in the harvester and (2) avoiding electromechanical feedback by maintaining a relatively stable apparent load and resonance state. These improvements to the control circuitry allow the energy harvester to achieve useable energy outputs of over 500µW with highly efficient energy conversion ratios (79%).